Nanostructured films of iron, tin and titanium oxides were grown on glass and quartz by gas phase decomposition of [Fe(OtBu)3]2, [Sn(OtBu)4] and [Ti(OiPr)4], respectively. Films obtained exhibit good adhesion and homogeneous morphology with structural features in the nanometer range. The influence of microstructure and phase on optical (α-Fe2O3and Fe3O4), gas sensing (SnO2) and photocatalytic (TiO2) properties was systematically studied to explore the potential of these coatings for technological applications.